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The Nanoscience Centre

Cambridge University nanofabrication and characterisation facility

clean_corridor.pngThe Cambridge Nanoscience Centre has a 663m2 cleanroom facility, which can be accessed by academic as well as industrial partners. The main lithography area is class 100. The rest of the cleanroom is divided into three class 10,000 areas. The class number refers to the maximum number of particles 0.5μm in diameter allowed in one cubic foot of cleanroom air. The cleanroom is equipped with state-of-the-art high-resolution e-beam, photo and nanoimprint lithography equipment.